JPS6255576U - - Google Patents
Info
- Publication number
- JPS6255576U JPS6255576U JP13504786U JP13504786U JPS6255576U JP S6255576 U JPS6255576 U JP S6255576U JP 13504786 U JP13504786 U JP 13504786U JP 13504786 U JP13504786 U JP 13504786U JP S6255576 U JPS6255576 U JP S6255576U
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- reaction gas
- crystal growth
- substrate
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504786U JPS6255576U (en]) | 1986-09-03 | 1986-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504786U JPS6255576U (en]) | 1986-09-03 | 1986-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255576U true JPS6255576U (en]) | 1987-04-06 |
Family
ID=31036860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13504786U Pending JPS6255576U (en]) | 1986-09-03 | 1986-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255576U (en]) |
-
1986
- 1986-09-03 JP JP13504786U patent/JPS6255576U/ja active Pending
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